The LEO 982 Field emission scanning electron microscope (FE-SEM, Carl Zeiss SMT Inc.
One Corporation Way Peabody, MA 01960) provides a means to achieve ultra high
resolution images in the secondary emissive mode. The instrument is an analytical work
station since it combines secondary imaging capabilities with backscatter electron imaging useful
for discriminating elements by atomic number contrast.
These imaging modes combined with an Oxford (Oxford Instruments, Inc., 130a Baker Ave. Ext., Concord, MA 01742) energy dispersive X-ray analyzer allow for positive identification of elements by spectral analysis,
mapping of element distribution, combined with qualitative and quantitative analysis of element
concentration. Particle sizing, counting, and chemical typing can be achieved using image
processing software on the X-ray analyzer using image processing software on the X-ray
analyzer.
View SEM Images
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